| Nitrogen flow capacity | ≥50 Nm 3 /h( normal temperature & normal pressure ) |
| Nitrogen purity | ≥99.999% |
| Residual oxygen | ≤0.001% |
| Nitrogen outlet pressure | 0.3-0.6Mpa( adjustable ) |
| microorganism | <1cfu/ m 3 |
| Dust content | Particle size≥5μm,Number of particles≤20/ m 3 |
| Particle size≥0.5μm<5μm,Number of particles≤3520/ m 3 | |
| O il content | ≤ 0.0005% |
| Dimension ( Length * width * height ) | 3800*1250*2750mm |
| Weight | 2400Kg |